Manganese Sputtering Targets

Mn, 99.9 – 99.99% pure

         Applications:                • Electronics
                                                • Semiconductor
                                                • Flat panel displays

         Specifications:

Material Type:                                         Manganese

Atomic Weight:                                       54.938045

Atomic Number:                                     25

Color/Appearance:                                Silvery Metallic

Thermal Conductivity:                           7.8 W/m.K

Melting Point:                                          1,244 °C

Coefficient of Thermal Expansion:       21.7 x 10-6/K

Theoretical Density:                                7.2 g/cc

Z Ratio:                                                      0.377

Sputter Method:                                       DC

Max Power Density:                                20 Watts/Square Inch

Type of Bond:                                           Elastomer

Notes:

- Elastomer Bonding is recommended for this material.

- Some materials and manufacturing methods may yield product with surface imperfections. In many cases, these imperfections are merely visual defects. Performance may be affected according to process requirements.

- This material may require special ramp up and ramp down procedures. Targets that have a low thermal conductivity are susceptible to thermal shock.